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    PRODUCT INFORMATION 

    SILICON WAFER

    PRODUCT

    • POLYSILICON WAFER CARRIER
    • POLYSILICON PADDLES AND SLEDS
    • POLYSILICON PLATES AND CATHODE COVERS
    • POLYSILICON TUBES AND END CAPS
    • VERTICAL BOATS
    • SPUTTERING TARGETS

    POLYSILICON WAFER CARRIERS

    • Designed to accommodate wafer from 4" to 8" in diameter
    • Made of unique, ultrahard, high purity CVD polysilicon
    • Available as plates, tubes or profile carriers
    • Slot configuration allows a wafer capacity of 1 to 400
    • Carriers are compatible with automated wafer transport systems

    POLYSILICON TUBES AND END CAPS
    • Size available up to 250mm
    • Available with ball joins and tabulation type gas fittings
    • SICO's unique process allows customized bonding for specialised applications and minor repairs
    • Matching polysilicon end caps can be supplied

    VERTICAL BOATS

    • Can be made according to customers specifications
    • Semiconductor-grade quality
    • Working temperature 1350XC
    • Joining or non-joining connecting technology
    POLYSILICON PLATES & CATHODE COVERS
    • For plasma and reactive inon etch processes
    • Made of CVD polysilicon and joined by SICO's proprietary bonding process
    • Available in size from 6" to 30" diameter

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

     

    SELETED PHISICAL PROPERTIES

     

    Polysilicon

    Silicon Carbide

    Quartz

    DENSITY

    2.33 g/cm3

    3.0 g/cm3

    2.2 g/cm3

    Expansion Coefficiency (1000Xc)

    3.8 X10-6/K

    4.8 X10-6/K

    0.5 X10-6/K

    SPECIFIC HEAT

    0.22 cal/(g PXC)

    0.27 cal/(g PXC)

    0.29 cal/(g PXC)

    THERMAL CONDUCTIVITY ( 1000XC )

    32W/(mK)

    36W/(mK)

    4W/(mK)

    Young ' s Modules

    2.9P107 psi

    4.06P107 psi

    1.02P107 psi

     

     

     

     

     

     

     

     

     

     

     
    ©Copyright 2004Phicom Asia-Pacific Co.,Ltd. All rights reserved.